What are the functions of oxide layer in high quality ic, Chemical Engineering

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What are the functions of oxide layer in high quality IC? Explain. 

Silicon has the unique ability to be oxidized into silica, which makes a chemically stable, protective and insulating layer on the surface of water.

 The functions of the oxide layer are

(i)   To mask against diffusion or ion-implant,

(ii)  To passivate the surface electrically and chemically.

(iii) To isolate single device from another, and

(iv)  To act as a component in MOS devices.  

 


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