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Etching and dry (plasma) etching

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Reference no: EM13910404

Using Deal-Grove model, determine the wet and dry oxidation time needed to grow 0.5 mu m of silicon dioxide (SiO2) on a bare silicon wafer at 1000 degree C.What is contact/proximity exposure and projection exposure, respectively?Compare their usefulness. Compare the advantages and disadvantages of wet etching and dry (plasma) etching.

Reference no: EM13910404

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