Explain lithography, Electrical Engineering

Explain Lithography.

Lithography- This is one of the processes which is carried out throughout manufacture of integrated circuits. Silica oxide (SiO2) layer is thermally grown on the wafer surface. The pattern is transferred by mask to the oxide layer as given- A photo resist liquid is equally applied over the oxide layer and dried. Photo resist is a material that changes its solubility in exact organic solvents, while exposed to ultra violet light. Non-polymerised parts are after that dissolved using organic solvents. This oxide layer below these parts is here etched using net chemical etchant. Through, this process, the pattern is transferred from the mask to the oxide. Throughout next diffusion, the layer of SiO2 serves as a mask.

Posted Date: 5/17/2013 6:12:19 AM | Location : United States

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