Photolithography in the fabrication of electronic devices, Chemical Engineering

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Outline a procedure for photolithography in the fabrication of electronic devices. What are the limitations of this procedure?

Photolithography is the process of transferring geometric shapes on a mask to the Surface of semiconductor water. The steps includes in the photolithographic process are wafer cleaning; barrier layer formation; photo resist application; soft baking; mask alignment; exposure and development; and hard-baking.

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