Explain the chlorine flow rate at the reactor pressure

Assignment Help Chemistry
Reference no: EM13273616

A silicon wafer is etched in a Cl2 plasma. A mass flow controller (used to meter the gas flow fed to the reactor) shows a reading of 100 sccm (sccm=standard cm3 per min; standard conditions are 273 K and 1 atm). The etching reactor operates at 100 mTorr pressure, and the reactor gas temperature is 500 K. (note: 1 atm =760 Torr.)

(a) What is the chlorine flow rate at the reactor pressure and temperature?

(b) If the etching rate of silicon is 0.50 ?/min, and the wafer is 300 mm in diameter, how many moles of silicon are etched per hour?

Reference no: EM13273616

Questions Cloud

Explain a certain rifle bullet has a mass : A certain rifle bullet has a mass of 5.73 g. Calculate the de Broglie wavelength of the bullet traveling at 1073 miles per hour. Physical constants can be found here.
What is jack weighted average cost of capital : The U.S. Treasury bill is yielding 6 percent and the market risk premium is 9 percent. Jack's tax rate is 35 percent. What is Jack's weighted average cost of capital?
What is the value of the third resistor : Three resistors are connected in parallel to a 12.0 V battery. Two of the resistance values are 58\Omega and 42\Omega. what is the value of the third resistor
Purchase from businesses that provide links via social media : List and analyze methods of alternative dispute resolution and determine which would be most effective in resolving genuine disputes that arise with consumers who may make purchases from businesses that provide links via social media.
Explain the chlorine flow rate at the reactor pressure : What is the chlorine flow rate at the reactor pressure and temperature. (b) If the etching rate of silicon is 0.50 ?/min, and the wafer is 300 mm in diameter, how many moles of silicon are etched per hour
What are the portfolio weights for a portfolio : What are the portfolio weights for a portfolio that has 205 shares of Stock A that sell for $98 per share and 180 shares of Stock B that sell for $138 per share? (Round your answers to 4 decimal places (e.g., 32.1616).)
What would be the new electrical force : If the initial electric Force is, F, and the electron were moved to one third he original distance toward the proton, what would be the new electrical force
Speculate why the similarities or differences might exist : Next, compare the level of capital spending across the two firms. Point out how the spending was similar and/or different and speculate why the similarities or differences might exist.
Legally astute social media marketing : iscuss the 4 components of a legally astute social media marketing manager who utilizes social media outlets for consumer transactions and how each component can mitigate the risk involved in doing business in cyberspace.

Reviews

Write a Review

Chemistry Questions & Answers

  Steps in the mechanism for the following reaction

Show all the steps in the mechanism for the following reaction, When benzene is mixed with deuterated sulfuric acid, deuterium is slowly incorporated onto the ring. Show the mechanism for this reaction and explain how this relates the sulfonation of ..

  Prior to placing piece of metal into the graduated cylinder

This assignment inhibits chemistry Laboratory Questions.

  Write the structures of the saytzeff elimination

Write the structures of the saytzeff elimination

  Calculate ph - chemistry questions

Chemistry Questions on Calculate P H

  How many mols of hydrogen can produce

how many mols of H 2 can produce

  Analysis of corrosion mechanisms

Analysis of corrosion mechanisms and preventative measures

  Chemical and pharmaceutical science

Write an equation for the formation of an acetal from reaction of excess methanol with benzaldehyde in the presence of an acid catalyst.

  Calculate the approximate sulphur

Calculate the approximate SO 2 mass emission in lb/day.

  What is the structure - stereochemistry

What is the structure (including functional groups)? Stereochemistry (racemic or single enantiomer)?

  Design a qualitative analysis scheme

Design a qualitative analysis scheme

  What will be the resultant pressure

What will be the resultant pressure when the stopcock is opened?

  The 1h nmr spectrum

Integrals for some of the resonances in the 1H NMR spectrum are higher than they should be due to the shear number of hydrogens in this compound

Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd