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Manufacturing and Product Development
Microlithography is a process that includes baking a semiconductor wafer. An experiment was conducted to study the temperature of a 200-mm-diameter wafer at different locations on the wafer during a new baking process. Independent random samples of wafers were selected, and a temperature sensor was placed on each wafer at one of four distances from the center of the wafer. The temperature was recorded (in °C) 80 seconds into the process. The summary statistics are given in the following table.
Location
T1
T2
T3
T4
Sample size
10
Sample mean
106.7
104.6
104.3
98.6
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