Describe how in atmospheric cvd systems gas phase collisions

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We have seen how conformal coverage in low pressure systems results from a low sticking coefficient, which causes multiple reemission and redeposi lion processes within the feature topography.

Describe how in atmospheric CVD systems. gas phase collisions by the reactants within the topograhical features can lead to good coverage and filling.

Reference no: EM131794319

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Describe how in atmospheric cvd systems gas phase collisions : Describe how in atmospheric CVD systems. gas phase collisions by the reactants within the topograhical features can lead to good coverage and filling.

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