What is the critical particle radius for 100 mm silicon wafe

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1 (a). What is the non-bonded area caused by a 0.3 µm particle on 150 mm wafers?

(b). If 150 mm wafers are specified to have 50 particles of 0.3µm size, what fraction of the wafer area will be non-bonded?

2. What is the critical particle radius for 100 mm silicon wafers?

3. What is resolution of a 160 MHz acoustic measurement of voids?

Reference no: EM131403966

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