What doses should be used in the adjacent peaks

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Reference no: EM131793948

In a particular application, it is important to produce a fairly flat profile over an ex-tended distance by ion implantation, as indicated below.

One way to do this is to superimpose several implants at different energies.

If phosphorus implants with energies of 0.5 R_p, R_p, 2R_p are used with a dose of 1 X 10¹⁴ cm^-2 in the middle peak, approximately what doses should be used in the adjacent peaks if the initial peak concentrations are to be the same?

Reference no: EM131793948

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