How non-ideal geometry would re-introduce narrow gate effect

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Invent a structure that can completely eliminate the narrow gate effects. This is known as the fully recessed stepped oxide (FROSOX) whose sidewall oxide is thicker than the gate oxide and they are connected by a step or an abrupt change of oxide thickness. Show how practical fabrication limitations will modify this stepped oxide structure and how the non-ideal geometry would re-introduce the narrow gate effects

Reference no: EM131322681

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