How does shadow-mask thickness affect dimensional control

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1. (a) How does shadow-mask thickness affect dimensional control?

(b) What effect does the contact versus proximitymode operation have, on shadow-mask resolution?

2. When test capacitors are made, it is usual to deposit the top electrode through a shadow mask because of speed and simplicity. If the capacitors are used to measure the dielectric constant ε, how much will ε values be affected if shadow-mask dimensional control is 100µm ± 5µm?

Reference no: EM131403955

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