Draw a flowchart of the surface micromachining

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A surface - micro machined cantilever (Fig. 2.27 a) does not have electrical connections between the cantilever and other structures (not shown in Fig. 2.27). For the electrical connection and insulation desired, more layers may be deposited and followed by etching. Draw a flowchart of the surface micromachining.

Reference no: EM131316599

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