Determine the etching time to finish the wet etching

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Reference no: EM131316563

A 20 - μ m - thick p++ membrane (Fig. 2.24) is desired for a micro device. Using a 500 - mm - thick (100) silicon wafer and KOH as an etchant, determine the etching time to finish the wet etching.

Reference no: EM131316563

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Determine the etching time to finish the wet etching : A 20 - μ m - thick p++ membrane (Fig. 2.24) is desired for a micro device. Using a 500 - mm - thick (100) silicon wafer and KOH as an etchant, determine the etching time to finish the wet etching.

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