Asperities of the interface region

Assignment Help Electrical Engineering
Reference no: EM13880269

A tool used for fabricating semiconductor devices consists of a chuck (thick metallic, cylindrical disk) onto which a very thin silicon wafer (p = 2700 kg/m3 · c = 875 J/kg · K, k = 177 W/m · K) is placed by a robotic arm. Once in position, an electric field in the chuck is energized, creating an electrostatic force that holds the wafer firmly to the chuck. To ensure a reproducible thermal contact resistance between the chuck and the wafer from cycle-to-cycle pressurized helium gas is introduced at the center of the chuck and flows (very slowly) radially outward between the asperities of the interface region.

1185_Asperities of the interface region.jpg

An experiment has been performed under conditions for which the wafer, initially at a uniform temperature Tw,i = 100°C, is suddenly placed on the chuck, which is at a uniform and constant temperature Tc = 23°C. With the wafer in place, the electrostatic force and the helium gas flow are applied. After 15 seconds, the temperature of the wafer is determined to be 33°C. What is the thermal contact resistance Rt,c (m2 · K/W) between the wafer and chuck? Will the value of Rt,c increase, decrease, or remain the same if air, instead of helium, is used as the purge gas?

Reference no: EM13880269

Questions Cloud

What if there are a large number of prizes : Your sole objective is to obtain the best of the three prizes. (Second best does not count.) A random selection provides a one-third chance of getting the best prize. Find a strategy that provides a greater chance.
Did it make a difference in the way you felt : Describe a situation where someone "filled your bucket" or "emptied your bucket." (This could be a coach, mentor, best friend, acquaintance, teacher, stranger, etc.) Did it make a difference in the way you felt? Why or why not
Is continuous innovation better than statistical thinking : Is continuous innovation better than statistical thinking - Depending on your answer, how should healthcare use your chosen approach?
What is the value of teamwork in school : assign a time estimate for completing each task. If conflict arises in the team planning the retirement party, what strategies can you use to resolve it? what is the value of teamwork in school? what is the value of teamwork in the workplace
Asperities of the interface region : To ensure a reproducible thermal contact resistance between the chuck and the wafer from cycle-to-cycle pressurized helium gas is introduced at the center of the chuck and flows (very slowly) radially outward between the asperities of the interfac..
Connection between the mexican son genre and the zapateado : What is the connection between the Mexican son genre and the zapateado
Which bid should you submit : Suppose it is possible to gain information about the cost so that you will know exactly what the cost will be ($80,000 or $120,000) before submitting a bid. Use a decision tree to find the value of this information.
What about you makes you a fit for this type of work : What about you makes you a fit for this type of work? Anything about your major now? Accomplishments in life? What type of person are you and how would that translate to a project like making a film where you'd work with many, many people
Evaluate potential effectiveness of permissive action link : Evaluate the potential effectiveness of permissive action link (PAL) for this purpose. Discuss one or two technical aspects in particular.

Reviews

Write a Review

Electrical Engineering Questions & Answers

  Find the probability that ball withdrawn from box 2 was red

Box 1 contains 5 red, 6 white, and 9 blue balls. Box 2 contains 7 red, 8 white, and 4 blue balls. A ball is withdrawn at random from Box 1 and placed in Box 2. Then, a ball is taken at random from Box 2.

  What logic function is most suitable for the operation

A light comes on in a storeroom when either (or both) of two doors is open. 1. What logic function is most suitable for this operation 2. Draw a circuit to represent each function using a logic gate

  Design a second-order banpass filter with center frequency

Design a second-order banpass filter with center frequency f=10. The gain should be zero at t=0 and t= 8. Select poles at -a ±j10.  Explain the influence of a on the frequency response.

  Desing a mod-16 asynchrous ripple up counter

Desing a mod-16 asynchrous ripple up counter by using j-k flip-flops. You need to design a j-k flip flop first and use it as the component in mod-16 up counter design. Show both j-k flip-flop design implementation results .

  What type of long-distance high-throughput wireless tech

The time has come for XelPharm to expand. The board of directors has purchased another warehouse for a second distribution facility. It's located in an industrial area, about eight miles from the company's headquarters.

  Calculate the developed torque at full load

A 480V, 60 Hz three phase induction motor has the following parameters: R1=R' 2= .3 ohms Xeq= 1 ohm Xc=600 ohms At full load, the motor speed is 1120 rpm, the rotational loss is 400W and the core loss is 1 kW.

  Determine its efficiency and the torque supplied

Determine its efficiency and the torque supplied by the prime mover. Sketch its power flow diagram.

  How to rotates the elements of an array stored

Write a 68000 assembly language subroutine, ROTMEM, which rotates the elements (words-size) of an array stored at location point to by (A0). The depth of the array is stored as the first element.

  How many memory chips are needed to build memory system

A mass memory system has 24 address lines and 16 data lines. (a) What is the size of this memory system (b) How many 64K x 8 memory chips are needed to build this memory system

  What is angular velocity of rotor field with the motor

The nameplate on a 460-V 50 hp 60 Hz four pole motor indicatesthat the speed at rated load is 1760 r/min. assume the motor to beat operating load. a) What is the slip of the rotor b)what is the frequency of the rotor currents

  Derive the state space equation of a dc motor

Derive the state space equation of a DC motor with: 1)supply voltage and load torque as inputs and 2)armature current, angular speed as outputs.

  What is the conventional b-c ratio with present worth

A flood control project with a life of 12 years will require an investment of $300,000 and annual maintenance costs of $25,000. The project will provide no benefits for the first two years but will save $40,000 per year in flood damage

Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd