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1) Find the final yield for a nine-mask-level process in which the average fatal defect density per cm2 is 0.1 for four levels, 0.25 for four levels, and 1.0 for one level. The chip area is 50 mm2. Use Y = e-NDA (Note: N = #of levels, D=average number of defects/unit area, A=area of chip)
2) An optical lithographic system has an exposure power of 0.3 mW/cm2. The required exposure energy for a positive photoresist is 140 mJ/cm2 and for a negative photoresist is 9 mJ/cm2. Assuming negligible times for loading and unloading wafers, compare the wafer throughput for positive photoresist and negative photoresist.
3) For an ArF-excimer laser 193 nm optical lithographic system with NA=0.65, k1=0.60, and k2=0.50, what are the theoretical resolution and depth-of-focus for this tool?
The shaft output of a three-phase, 60 Hz induction motor is 100 HP. The friction and windage losses are 900 W, the stator core loss is 4200 W, and the stator copper loss is 2700 W. If the slip is 3.75%, what is the effïciency of the motor
A sample of non-ideal gas is made to undergo an expansion process during which its pressure and volume are related as shown in the table below. The energy of the gas at the start and finish of the process is measured and found to be 5 and 3.2 Btu
A silicon diode has a reverse current of 5 uA and 25 degrees celcius and 100uA at 100 degrees celcius. What is the saturation current and surface leakage current at 25 degrees celcius
A 10 kHz signal modulates a 500 MHz carrier, with a modulation index of 2. What are the maximum and minimum values for the instantaneous frequency of the modulated signal
A 4 MHz time-harmonic uniform TEM plane wave that is traveling through a lossy nonmagnetic medium has an amplitude that attenuates by 20% for each meter of propagation. The electric field of the wave leads the magnetic field by 35°
What do the letters PCM and PAM stand for? Why is PCM transmission preferred over PAM transmission? Give at least two reasons in your answer.
A certain transmission line is 10 meters long. Measurements indicate that the total inductance of the cable is 16 uH. Standing wave measurements indicate that the voltage reflection coefficient at the load is 0.5 + j0
The exponential Fourier series coecients for a signal x(t) are: ak= { 1.57 when k=0, 0 when k is even and k doesnt equal 0, ((-1)(k-1)/2)/k when k is odd} Determine the following: (a) Plot the spectrum of the Fourier series.
he sensor to be used has a transfer function of ? Q volts, where Q is in gal/min, and an output impedance of 2.0 k?. Tests show that the output of the sensor has 60 Hz noise of 0.8 V rms. Design a signal-conditioning system, including noise filter..
A Si IMPATT diode is operated at 140 GHz with a dc bias of 15 V and an average biasing current 150 mA. (a) If the power conversion efficiency is 25% and the thermal resistance of the diode is 4OoCnV.
Suppose we have a causal LTI system with rational system function H(s). We don't know H(s), but we do have the following information: i. When the input to the system is x(t) = u(t), the output y(t) is absolutely integrable.
Sven has decided to make and sell his grandmother's pasta. He rents a building for $600/month and pasta equipment for $300/month. The pasta costs $.20 /pound in raw materials to make . Sven can make up to 3000 pounds a month by himself.
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