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Discuss the major advanlagcs and disadvanlagcs of ckclron beam lithography. Poly-Si of the following structure is to be etched using a completely anisotropic dry-etch process, to remove poly-Si at a rate of 0.1 µm /min. However, this etch process has poor selectivities: selectivity to Si02 is 5, selectivity to photoresist is 2.
(a) Sketch the cross-section after 5 minutes of etching.
(b) Calculate the angle of the Si02 sidewalls after 5 minutes of etching.
determine the optimum values of x and y involved in Eqs. (92) to (95).
An electric motor under steady load draws 9.7 amperes at 110 volts; it delivers 0.93 Kw of mechanical energy. The temperature of the surroundings is 300 K. What is the total rate of entropy generation in W K-1?
Per mole of methane, how much heat is lost from the furnace, and how much heat is transferred in the heat exchanger?
An analyst gathered the following information about the return distributions for two portfolios during the same time period:
What are the advantages of external recruiting?
Balanced wye-connected loads drawing 10 kW at 0.8 power factor lagging and 15 kW at 0.9 power factor leading are connected in parallel and supplied by a 60-Hz, 300-V, three-phase system. Find the line current delivered by the source.
What is the binding energy in J per nucleon for the cobalt-60 nucleus (atomic masses: 60Co 59.9338 amu; 1H=1.00782 amu). What is the de Broglie wavelength of the emitted particle if it has a velocity equal to 0.90c where c is the speed of light?
Solve the mass balance equation to obtain an expression for V (t). Then substitute for V in the potassium chloride balance and solve for C (t). Calculate the KCI concentration in the tank at the moment the tank overflows.
Using the data given in Appendix C (available online at booksite .Elsevier.com/Towler), calculate the gross and net calorific values of the gas. Give your answer in MJ/m3 , at standard temperature and pressure.
If the feed contains 0.2% argon (from the nitrogen separation process), calculate the purge rate required to hold the argon in the recycle stream below 5.0%. Percentages are by volume.
Limestone (calcium carbonate) particles are stored in 50-L bags. The void fraction of the particulate matter is 0.30 (liter of void space per liter of total volume) and the specific gravity of solid calcium carbonate is 2.93. (a) Estimate the bulk..
A beaker filled with an equimolar liquid mixture of ethyl alcohol and ethyl acetate evaporates at O°C into still air at 101 kPa (1 atm) total pressure. Assuming Raoult's law applies, what will be the composition of the liquid remaining when half t..
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