Vibrating beam accelerometer

The electrodes are driven by a high frequency voltage (1 MHz). The displacement is measured using a phase detector from the change of
capacitance between the cantilever and the electrodes. The frequency responce is typically up to 500-2500 Hz.
A vibrating beam accelerometer can be implemented using Micro Electro-Mechanical Systems (MEMS):

Posted Date: 8/28/2012 7:15:35 AM | Location : United States

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